InChI=1/C14H13F2N5O3S/c15-14(16)23-9-4-3-8(5-10(9)24-14)18-11(22)6-25-13-20-19-12(21(13)17)7-1-2-7/h3-5,7H,1-2,6,17H2,(H,18,22)/f/h18H 5D9F33AF37ABD6F7