InChI=1/C16H16FNO5S/c1-10-5-6-12(17)15-11(10)4-3-9-18(15)24(20,21)14-8-7-13(23-14)16(19)22-2/h5-8H,3-4,9H2,1-2H3	372B9126D94560E2