InChI=1/C14H20F6N3O5PS/c1-4-27-29(24,28-5-2)22-12(13(15,16)17,14(18,19)20)21-23-30(25,26)11-8-6-10(3)7-9-11/h6-9,21,23H,4-5H2,1-3H3,(H,22,24)/f/h22H	FE0D6AAFBF3EDAC9