InChI=1/C14H17F3N3O5P/c1-3-20(7(2)26(23,24)25)6-8-4-9(14(15,16)17)5-10-11(8)19-13(22)12(21)18-10/h4-5,7H,3,6H2,1-2H3,(H,18,21)(H,19,22)(H2,23,24,25)/p-1/t7-/m1/s1/fC14H16F3N3O5P/h18-19,23H/q-1	C9DE7B137BF5B0F1