InChI=1/C10H13F2N4O4P/c11-10(12,21(18,19)20)3-1-2-5-4-14-7-6(5)15-9(13)16-8(7)17/h4,14H,1-3H2,(H2,18,19,20)(H3,13,15,16,17)/p-3/fC10H10F2N4O4P/h13H2/q-3 872389852431C909