InChI=1/C11H13F2N4O4P/c12-11(13,22(19,20)21)7-3-6(7)1-2-17-5-16-8-9(17)14-4-15-10(8)18/h4-7H,1-3H2,(H,14,15,18)(H2,19,20,21)/p-2/t6-,7-/m1/s1/fC11H11F2N4O4P/h15H/q-2	0778C87D9BEB199C