InChI=1/C10H14F2N5O4P/c11-10(12,22(19,20)21)3-1-2-4-17-5-14-6-7(17)15-9(13)16-8(6)18/h5H,1-4H2,(H2,19,20,21)(H3,13,15,16,18)/p-2/fC10H12F2N5O4P/h16H,13H2/q-2	B18BE80624323991