InChI=1/C14H21F2N4O4P/c1-3-23-25(22,24-4-2)14(15,16)7-5-6-9-8-18-11-10(9)19-13(17)20-12(11)21/h8,18H,3-7H2,1-2H3,(H3,17,19,20,21)/p-1/fC14H20F2N4O4P/h17H2/q-1	EBF0130E06B609FE